To provide a method and an apparatus for inexpensively and efficiently removing, from a gas containing PFC (perfluorocompounds), a (gas) component which reacts with water and produces a solid substance and maintaining a high PFC decomposition rate.
The method for catalytically decomposing the PFC in a gas flow containing the gas component which reacts with water and produces the solid substance and further containing the PFC is provided at least with: a solid substance producing process that allows the gas flow to come into contact with water and produces the solid substance; a solid substance capturing process that eliminates the produced solid substance; and a PFC catalytic decomposition process. Thereby, clogging in the catalytic PFC decomposition apparatus hardly occurs and high PFC decomposition performance can be maintained.
TAMADA SHIN
RI KOKUN
HIGASHIYAMA KAZUHISA
