Title:
METHOD AND APPARATUS FOR CHEMICAL TREATMENT OF ARTICLE IN CHAMBER HAVING APPROACH PORT SEALED BY DOOR
Document Type and Number:
Japanese Patent JPS62167893
Kind Code:
A
Abstract:
A method and apparatus is provided for chemically treating articles, generally in a corrosive environment by etching or the like, where a corrosive substance is applied to the articles being delivered through a substantially closed chamber. The chamber is provided with access through an openable door, and a seal is provided between the door and the wall of the chamber. The seal is flexible and is inflatable, to prevent a treatment fluid with which articles are being treated within the chamber, from being dispersed from inside the chamber to outside the chamber at the juncture of the door with the wall of the chamber in which the door is located. The seal is expanded by means of a fluid pressure, and is releasable upon desired access to the chamber.
Inventors:
ASH JAMES J
Application Number:
JP26572686A
Publication Date:
July 24, 1987
Filing Date:
November 10, 1986
Export Citation:
Assignee:
CHEMCUT CORP
International Classes:
C23F1/00; C23F1/08; H05K3/00; (IPC1-7): C23F1/00; C23F1/08
Attorney, Agent or Firm:
Aoki Akira