METHOD AND APPARATUS FOR CONVEYING THIN SHEET-LIKE MATERIAL

Title:

METHOD AND APPARATUS FOR CONVEYING THIN SHEET-LIKE MATERIAL

Document Type and Number:

Japanese Patent JP2007051001

Kind Code:

A

Abstract:

To provide a method and an apparatus for conveying a thin sheet-like material which smoothly convey a glass substrate along a predetermined conveying face while surely holding it in a nearly horizontal attitude and having high reliability.

This conveying apparatus 10 comprises an air guide unit 24 having: a lower side air guide 18 jetting a gas from the plurality of portions of a generally flat upper surface part 16 upward and disposed so that the upper surface part 16 is positioned in proximity to the lower side of the conveying face 14; and an upper side air guide 22 jetting the gas from the plurality of portions of a generally flat lower surface part 20 downward and disposed so that the lower surface part 20 is positioned in proximity to the upper side of the conveying face 14. The movement of the glass substrate 12 is restrained on both vertical sides in the state of non-contact.

Inventors:

NAGURA NARIYUKI
HAMANAKA SUKEAKI
OGURI TSUTOMU

Application Number:

JP2005239101A

Publication Date:

March 01, 2007

Filing Date:

August 19, 2005

Export Citation:

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