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Title:
METHOD AND APPARATUS FOR COOLING OF COLD TRAP
Document Type and Number:
Japanese Patent JPH11201954
Kind Code:
A
Abstract:

To provide a cooling method for a cold trap which can trap hydrocarbons, in a wide range, which contain a low-boiling-point component and to provide its apparatus.

A first buffer device 6 which condenses and traps H2O and CO2 contained in the air is installed at the preceding stage of a heat exchange part 7 inside a heat exchanger 4 whose inside is provided with the heat exchange part 7 used to cool the air to a cryogenic temperature. In addition, a second buffer device 8 by which O2 being liquefied in the air is gasified is installed at the posterior stage of the heat exchange part 7. The second buffer device 8 is connected to a jacket 10 which is used to cool a trap tube 12.


Inventors:
OTSUKI SATOSHI
ADACHI MASAYUKI
OYA TSUTOMU
Application Number:
JP2025498A
Publication Date:
July 30, 1999
Filing Date:
January 17, 1998
Export Citation:
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Assignee:
HORIBA LTD
International Classes:
G01N30/08; (IPC1-7): G01N30/08
Attorney, Agent or Firm:
Hideo Fujimoto