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Title:
METHOD AND APPARATUS FOR DECOMPOSING HALOGEN COMPOUND
Document Type and Number:
Japanese Patent JP2008155070
Kind Code:
A
Abstract:

To efficiently decompose halogen compounds such as CF4, C2F6 at low cost.

The method for decomposing halogen compounds is characterized in that halogen in a gas stream is converted into hydrogen halide by bringing the gas stream containing halogen compounds such as CF4, C2F6 into contact with a catalyst containing Al at 200-800C in the presence of an effective amount of hydrogen and oxygen. By this method, halogen compounds can efficiently be decomposed.


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Inventors:
SUGANO SHUICHI
MUSHA SHUJI
KARASAWA HIDETOSHI
SASAKI TAKASHI
Application Number:
JP2006343040A
Publication Date:
July 10, 2008
Filing Date:
December 20, 2006
Export Citation:
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Assignee:
HITACHI LTD
International Classes:
B01D53/86; B01J21/04; B01J21/06; B01J23/06; B01J23/75; B01J23/755; B01J23/89
Domestic Patent References:
JPH0810572A1996-01-16
JPH0751539A1995-02-28
JP2001293335A2001-10-23
JP2001137659A2001-05-22
Foreign References:
WO2000009258A12000-02-24
Attorney, Agent or Firm:
Yusuke Hiraki



 
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