METHOD AND APPARATUS FOR DETECTING BLADE DISPLACEMENT OF SLICING MACHINE

Title:

METHOD AND APPARATUS FOR DETECTING BLADE DISPLACEMENT OF SLICING MACHINE

Document Type and Number:

Japanese Patent JPH08187725

Kind Code:

A

Abstract:

PURPOSE: To accurately detect the displacement of a blade in the deflecting direction during slicing for quarrying a wafer from a work.

CONSTITUTION: A magnet 22 is opposed to a blade 10 which has a slicing inner peripheral blade 11 to change magnetic characteristics in a circumferential direction, and a magnetic field is formed by the both. A coil 24 is wound on the periphery of the magnet 22. In the case of rotating the blade 10, the electromotive force generated in the coil 24 by the electromagnetic induction and the blade rotating speed are detected. A separating distance (d) between the magnet 22 and the blade 10 is calculated based on the electromotive force and the speed, and the displacing amount of the blade 10 in the deflecting direction is calculated from the distance (d).

Inventors:

KAWAGUCHI KEIJI
HAMAZAKI TATSUMI
TADERA YOSHIHIRO
ABE YOSHINORI

Application Number:

JP178295A

Publication Date:

July 23, 1996

Filing Date:

January 10, 1995

Export Citation:

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Assignee:

TOYO A TEC KK

International Classes:

B24B27/06; B23D59/00; B28D5/02; (IPC1-7): B28D5/02; B24B27/06

Attorney, Agent or Firm:

Etsushi Kotani (3 outside)

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