PURPOSE: To detect an OF orientation highly efficiently and highly accurately with a simple structure.
CONSTITUTION: While a single crystal ingot W is rotated, its crystal habit line is optically detected by a crystal habit line detecting sensor 14, and the rotation of the single crystal ingot W is stopped when the crystal habit line is detected. Then while the single crystal ingot W is rotated in a predetermined direction at very slow speed, its crystal axis is detected by an X-ray apparatus 9. Although determination of an OF orientation by means of X-rays is usually possible by applying X-rays from a plurality of directions or by varying application angles of the X-rays, use of the crystal habit line of the crystal allows detection of the OF orientation in a short time with high efficiency and high accuracy since single detection of the crystal axis orientation by the X-ray apparatus 9 is sufficient. In addition, only a comparatively inexpensive crystal habit line detecting sensor 14 is attached to a single X-ray apparatus 9 as a detector, so that the detector can be simplified in structure and reduced in cost.
TERAJIMA SEIICHI
MASUI TSUMORU
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