Title:
METHOD AND APPARATUS FOR DRIVING MOVABLE MEMBER IN VACUUM DEVICE
Document Type and Number:
Japanese Patent JP2974947
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To make an airtight part and drive part projecting from a device as small as possible by providing the operational range of a link and drive shaft parallel to a movable member within the projection range of the reciprocated movable member.
SOLUTION: When a handle 9 is rotated counterclockwise under the condition of a valve seat 2 closing a through hole 1a, a guide plate 7 contracts a bellows 11 and approaches the lateral side of a drive chamber 1d. At the same time, the inner end of a drive shaft 4 projects into the drive chamber 1d to thrust a drive link 10. A second fulcrum E of a link 3 connected to the drive link 10 is drivably rotated in the direction E' about a rotary fulcrum C of a pin 3a to rotate the link 3 clockwise. Since a pin 3b provided in a first fulcrum D moves along a guide groove 2b, the valve seat 2 moves to a shelter receiving part 1b and arrives at a position under the condition of opening the through hole 1a. Thus, a member to open and close the through hole except for the handle does not protrude from the front projection area of a vacuum gate valve.
Inventors:
URYU SHUICHI
TATEYAMA SHOGO
TATEYAMA SHOGO
Application Number:
JP24791895A
Publication Date:
November 10, 1999
Filing Date:
September 26, 1995
Export Citation:
Assignee:
NIPPON SEIKOSHO KK
International Classes:
F16K3/02; F16K31/44; F16K31/52; F16K51/02; (IPC1-7): F16K3/02; F16K31/44; F16K51/02
Domestic Patent References:
| JP62237174A | ||||
| JP3149469A | ||||
| JP4119278A | ||||
| JP61940U | ||||
| JP725371U | ||||
| JP6181082U |
Attorney, Agent or Firm:
Soga Doteru (6 people outside)