METHOD AND APPARATUS FOR FORMING DIFFUSION SURFACE LAYER

Title:

METHOD AND APPARATUS FOR FORMING DIFFUSION SURFACE LAYER

Document Type and Number:

Japanese Patent JPS62207873

Kind Code:

A

Inventors:

TADEUSU BUIIRUTSUHIYON
IERUJI MIHIYARUSUKII
TADEUSU KARUPINSUKII
YANISU TOROYANOUSUKII
ADAMU RECHIIIEUITSUTSU

Application Number:

JP4506087A

Publication Date:

September 12, 1987

Filing Date:

February 27, 1987

Export Citation:

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Assignee:

POLITECHNIKA WARSZAWSKA

International Classes:

C23C8/36; C23C8/06; C23C10/08; C23C16/34; C23C16/452; C23C16/50; C23C; (IPC1-7): C23C8/36; C23C10/08; C23C16/34; C23C16/50

Attorney, Agent or Firm:

Kyozo Yuasa

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