Title:
有機高分子薄膜の形成方法及び形成装置
Document Type and Number:
Japanese Patent JP5410235
Kind Code:
B2
Inventors:
Noguchi
Ken Momono
Irikura Steel
Ken Momono
Irikura Steel
Application Number:
JP2009238179A
Publication Date:
February 05, 2014
Filing Date:
October 15, 2009
Export Citation:
Assignee:
Kojima Industries Corporation
ULVAC, Inc.
ULVAC, Inc.
International Classes:
C23C14/12; C23C14/24; C23C14/56
Domestic Patent References:
| JP11172418A | ||||
| JP2002283490A | ||||
| JP4080235A |
Foreign References:
| WO2007135870A1 | ||||
| WO2003085157A1 |
Attorney, Agent or Firm:
Michio Nakajima
Masahiro Nakashima
Masahiro Nakashima