Title:
METHOD AND APPARATUS FOR FORMING SINTERED BODY FILM USING LASER
Document Type and Number:
Japanese Patent JP2014185358
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a practical laser sintered body film forming method and apparatus which can form a metal nanoparticle sintered body film having high adhesion as a functional film, and can form a minute functional film requiring high accuracy with a high yield.SOLUTION: In a method and apparatus for forming a sintered body film using a laser, a metal nanoparticle dispersion in which metal nanoparticles are dispersed is applied onto a substrate 1 through an applicator 2, and the application region of the metal nanoparticle dispersion is irradiated with a laser beam by a laser beam irradiation device 5 to form a metal sintered body film on the substrate 1. The application of the metal nanoparticle dispersion is performed while maintaining the substrate 1 at a constant temperature by a heating device so that wettability of the dispersion is not changed, and when the metal nanoparticles are sintered by laser beam irradiation, the application of the metal nanoparticle dispersion is performed while spraying an inert gas to a laser beam irradiation part in the atmosphere.
Inventors:
ONDA MAMORU
SUZUKI MASAYOSHI
TOMITA TAKAHISA
YUMINO YUICHI
SUZUKI MASAYOSHI
TOMITA TAKAHISA
YUMINO YUICHI
Application Number:
JP2013059848A
Publication Date:
October 02, 2014
Filing Date:
March 22, 2013
Export Citation:
Assignee:
M & M RES INST
International Classes:
C23C24/08; B22F3/105; B22F7/04; H05K3/10
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Foreign References:
| WO2009072603A1 | 2009-06-11 |
Attorney, Agent or Firm:
Polaire Intellectual Property Corporation