PURPOSE: To simply accelerate an evaporated substance in a charged state and to firmly stick a vapor-deposited film to a substrate by impressing voltage to electrodes of a prescribed shape placed between a vapor depositing source and the substrate and by vaporizing the source.

CONSTITUTION: Blade-shaped electrodes 3, wiry or fine wiry electrodes are placed between a vapor depositing source 1 and a substrate 2. The source 1 is vaporized by heating with a heater or the like and voltages Va, Vd are impressed to the electrodes 3 and the substrate 2, respectively. A vapor-deposited film sticks firmly to the substrate by the above-mentioned simple method.