Title:
METHOD AND APPARATUS FOR INFRARED PYROMETER CALIBRATION IN HEAT TREATMENT SYSTEM
Document Type and Number:
Japanese Patent JPH09119868
Kind Code:
A
Abstract:
To perform calibration accurately and quickly with a small quantity of energy.
The apparatus for calibrating a temperature probe 15, e.g. a pyrometer 50, employs a stabilized light source, e.g. a light emitting diode, in the simulation of a black body having a known temperature. The light source is housed in a chamber and emits a light beam through an opening. The calibration apparatus may be inserted into a heat treatment chamber 60 and the temperature probe may be removed from the chamber 60. The opening is aligned with the input part of temperature prove 15 using an alignment tool. The calibration apparatus may be integrated with the alignment tool or removed therefrom.
Inventors:
MAAKU YAMU
Application Number:
JP22920796A
Publication Date:
May 06, 1997
Filing Date:
July 26, 1996
Export Citation:
Assignee:
APPLIED MATERIALS INC
International Classes:
G01J5/00; G01J5/02; G01J5/52; G01K15/00; H01L21/66; (IPC1-7): G01J5/02; G01K15/00; H01L21/66
Attorney, Agent or Firm:
Yoshiki Hasegawa (3 outside)