PURPOSE: To inspect optical loss and irregularity distribution simply and quantitatively by measuring the intensity of the reflected light of laser light which is inputted into the surface of a lightguide film.
CONSTITUTION: A lightguide film 4 on a substrate 3 is fixed to a lightguide film holding part 2. Helium neon laser light 1 is inputted into the surface of the film 4 at an angle of 45 degrees with respect to the normal line of the film. The reflected light is received with a silicon photodetector 6 through a pinhole slit 5, and the intensity of the reflected light is measured. The holding part 2 is moved in the direction in parallel with the surface of the film, and the film surface is scanned with the light 1. Thus the intensity of the reflected light is measured. The intensity of the reflected light from the lightguide film having the different homogenity is measured. Thereafter, fine machining is performed on the film, and a clad layer is formed. Twenty straight lightguides are formed on the respective lightguide film. The optical loss at 1.55-μm wavelength is measured by a cut-back method. Thus, the quantitative inspection for the optical loss of the lightguide film and the irregularity distribution can be performed simply.
KOMINATO TOSHIUMI
OMORI YASUJI
| JPS6153540A | 1986-03-17 | |||
| JPS63263453A | 1988-10-31 |
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