To provide an optical performance inspection apparatus, for a lens, by which the optical performance of the lens can be inspected by a method where, even when a magnification optical system is used, luminous flux is tracked automatically and image is always captured by the magnification optical system.
On the basis of the imaging signal of a pinhole image obtained from a CCD 8, the deviation amount of the main beam of light of a lens 9 to be inspected from the optical axis of the magnification optical system is found by a processing unit 18. When a microscope 9 is moved in its optical axis direction, the processing unit 18 calculates the correction amount in the X-direction and the Y-direction of the microscope 9 on the basis of the deviation amount, a microscope and CCD drive system 12 is controlled, and the microscope 9 is driven by its correction amount portion. Thereby, even when the microscope 9 is used, the pinhole image can always be tracked automatically.
HAYASHI HIKARI
TANAKA HIROKAZU
