To provide a method wherein foreign matter on a face of a carrier film can be surely eliminated, further change of a pathline in conveying a carrier film by a foreign matter eliminative device can be controlled, and a ceramic green sheet of few dispersion in thickness can be obtained.

A carrier film 1 is conveyed, and a carrying direction of the carrier film 1 is changed by a support roll 4. Foreign matter on the face of the carrier film is eliminated by a gum roller 5 as the foreign matter eliminative device in an area wherein the carrier film 1 comes in contact with an outer peripheral face of the support roll 4. Thereafter, ceramic slurry 7 is applied to the carrier film 1 by using a ceramic slurry application device 6, and the ceramic green sheet is formed.