Title:
METHOD AND APPARATUS FOR MEASUREMENT OF GRINDING CENTER RESIDUE OF CHIPPED SPHERE
Document Type and Number:
Japanese Patent JP3740393
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain a method and an apparatus for the measurement of the grinding center residue of a chipped sphere wherein the existence of the grinding center residue of an optical component can be measured with high accuracy and with high efficiency, the grinding center residue can be measured precisely even when a measuring parame ter is changed, the generation of a flaw on the surface of a measuring object can be prevented because a measuring device does not come into contact with the measur ing object and the generation of a flaw part in a receiver part can be prevented be cause of a system in which the measuring object is put into a receiver jig.
SOLUTION: In the method, the grinding residue generated in the central part on the surface of the chipped sphere is measured when the spherical grinding operation of the chipped sphere is performed by using a cup-shaped grinding wheel, the grinding residue is divided into two luminous fluxes of an equal intensity by using coherent light, one luminous flux is made incident on a semitransparent mirror, the other luminous flux is made incident on a lens to be inspected, and interference fringes are generated due to the difference in an optical path between both beams of reflected light when a very small height difference exists on the surface of the lens. When the existence of the interference fringes is judged, the grinding residue is specified simply.
Inventors:
Sakae Ishida
Application Number:
JP2001225250A
Publication Date:
February 01, 2006
Filing Date:
July 26, 2001
Export Citation:
Assignee:
Canon Inc
International Classes:
G01B11/24; G01B11/30; B24B13/00; (IPC1-7): G01B11/24; B24B13/00
Domestic Patent References:
| JP2001150322A | ||||
| JP2002289563A |
Attorney, Agent or Firm:
Yukio Takanashi