METHOD AND APPARATUS FOR MEASUREMENT OF SEMICONDUCTOR ENERGY GAP

Japanese Patent JPH07115114

A

PURPOSE: To read out the value of an energy gap more simply in a short time, by passing the light source having a constant wavelength through a test piece, and utilizing the obtained characteristics of the transmitted spectrum with an image processing system. CONSTITUTION: The light having a constant wavelength band (λ) with an energy gap(Eg) as the center is irradiated on a test piece. After the transmission function of λ=f(x) is obtained with an optical filter 5, the image is formed. The live image plane from an image input device 6 is stored in the frame memory of an image-signal processor 7. Then, scanning is performed along the side (x) for the image on a monitor. The scanned pixel value (x) and the Eg pixel value Xgap are compared. At the place where both values agree, the (x) coordinates of the pixel are read, and the λ gap is obtained from the algorithm of λ=f(x). Then, the relationship of gap (eV)=1.239/λ gap (μm) is used, and the value is converted into [eV] unit of the gap, and Eg is obtained.

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KIYOU SEISHIYUN
KIN HOYUU
BAI KAZUNARI

JP33175292A

May 02, 1995

December 11, 1992

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KOREA ELECTRONICS TELECOMM

H01L21/66; (IPC1-7): H01L21/66

Kazuko Tomita (2 outside)

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