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Title:
METHOD AND APPARATUS FOR MEASURING DEGREE OF VACUUM IN VACUUM CASE FOR INFRARED DETECTOR
Document Type and Number:
Japanese Patent JPH08285716
Kind Code:
A
Abstract:

PURPOSE: To obtain method and apparatus for measuring the degree of vacuum in a vacuum case for infrared detector in which variation in the degree of vacuum can be measured accurately and the duration of vacuum can be measured and evaluated accurately in a short term.

CONSTITUTION: The apparatus for measuring the degree of vacuum in a vacuum case 3 comprises an infrared detector 1, and a temperature measuring diode 2 outputting an electric signal corresponding to the detected temperature. The apparatus for measuring the degree of vacuum in a vacuum case 3 further comprises a cooler 10 for cooling the detector 1 with a constant power, a voltmeter 20 for detecting the voltage value of an electric signal outputted from the diode 2, a memory section 21 for storing a data indicative of the relationship between the degree of vacuum measured before sealing the vacuum case 3 and the temperature corresponding to a voltage detected by the voltmeter 20, and an arithmetic section 22 for operating the degree of vacuum based on a data stored in the memory section 21 and a temperature corresponding to a voltage detected by the voltmeter 20 after sealing the vacuum case 3.


Inventors:
FUSHIMI NAOFUMI
FUJII HIDEKI
KIYOTA TAIJIRO
Application Number:
JP11000795A
Publication Date:
November 01, 1996
Filing Date:
April 11, 1995
Export Citation:
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Assignee:
NIKON CORP
International Classes:
G01L21/00; F16L59/06; G01J1/02; (IPC1-7): G01L21/00; F16L59/06; G01J1/02
Attorney, Agent or Firm:
Osamu Kiuchi



 
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