Title:
METHOD AND APPARATUS FOR MEASURING TEMPERATURE
Document Type and Number:
Japanese Patent JP2023116440
Kind Code:
A
Abstract:
To provide apparatuses and methods for measuring a substrate temperature.SOLUTION: In one or more embodiments, an apparatus for estimating a temperature is provided and includes a plurality of electromagnetic radiation sources positioned to emit electromagnetic radiation toward a reflection plane, and a plurality of electromagnetic radiation detectors. Each electromagnetic radiation detector is positioned to sample the electromagnetic radiation emitted by a corresponding electromagnetic radiation source of the plurality of electromagnetic radiation sources. The apparatus also includes a pyrometer positioned to receive electromagnetic radiation emitted by the plurality of electromagnetic radiation sources and reflected from a substrate disposed at a reflection plane and electromagnetic radiation emitted by the substrate. The apparatus includes a processor configured to estimate a temperature of the substrate based on the electromagnetic radiation emitted by the substrate. Methods of estimating a temperature are also provided.SELECTED DRAWING: Figure 1
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Inventors:
JOSEPH M RANISH
Application Number:
JP2023075487A
Publication Date:
August 22, 2023
Filing Date:
May 01, 2023
Export Citation:
Assignee:
APPLIED MATERIALS INC
International Classes:
G01J5/00; G01J5/02; H01L21/66
Attorney, Agent or Firm:
Sonoda & Kobayashi Patent Attorneys Corporation