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Title:
METHOD AND APPARATUS FOR MEASURING THREE-DIMENSIONAL SHAPE
Document Type and Number:
Japanese Patent JP2001343222
Kind Code:
A
Abstract:

To provide a method and an apparatus for measuring three- dimensional shapes in which objects to be measured can be highly accurately and nondestructively measured in a simple constitution.

In the apparatus and method for measuring three-dimensional shapes, the shape of the measurement sample is measured by using an optical heterodyne measurement beat signal obtained from a face of the measurement sample as a focus detection signal in the three-dimensional shape-measuring apparatus which uses the optical heterodyne method for measuring the three- dimensional shape of the sample by focusing the measurement light onto the measurement sample face with the use of an optical head.


Inventors:
IIJIMA HITOSHI
Application Number:
JP2000168195A
Publication Date:
December 14, 2001
Filing Date:
June 05, 2000
Export Citation:
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Assignee:
CANON KK
International Classes:
G01B11/00; G01B11/24; G01B11/245; G01B9/02; (IPC1-7): G01B11/24; G01B9/02; G01B11/00
Domestic Patent References:
JPH04188003A1992-07-06
JPH02173505A1990-07-05
JPH0474914A1992-03-10
JPH085314A1996-01-12
JP2000146516A2000-05-26
JPH0395906U1991-09-30
JPH10185529A1998-07-14
JPH0560511A1993-03-09
JPH0650733A1994-02-25
JPS61202128A1986-09-06
JPH0821704A1996-01-23
JPH02122206A1990-05-09
Attorney, Agent or Firm:
Takanashi Yukio