Title:
チタン－タングステンターゲットにおける小結節制御のための方法および装置
Document Type and Number:
Japanese Patent JP7208711
Kind Code:
B2
Abstract:
Embodiments of the present disclosure include methods and apparatus for controlling titanium-tungsten (TiW) target nodule formation. In some embodiments, a target includes: a source material comprising predominantly titanium (Ti) and tungsten (W), formed from a mixture of titanium powder and tungsten powder, wherein a grain size of a predominant quantity of the titanium powder is less than or equal to a grain size of a predominant quantity of the tungsten powder.
Inventors:
Wei Junchi
Cao Zitao
Oh Yu Shen
Jhupudi Anan Krishna
Savant Dia Kirank Mar
Wan Shin
shirnavkarasu sriskan saraja
Cao Zitao
Oh Yu Shen
Jhupudi Anan Krishna
Savant Dia Kirank Mar
Wan Shin
shirnavkarasu sriskan saraja
Application Number:
JP2017534713A
Publication Date:
January 19, 2023
Filing Date:
October 22, 2015
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
C23C14/34; B22F1/00; B22F1/14; C22C27/04
Domestic Patent References:
| JP2002256422A | ||||
| JP2002105636A | ||||
| JP4232260A | ||||
| JP4193947A |
Foreign References:
| WO2011093334A1 |
Attorney, Agent or Firm:
Shinichiro Tanaka
Hiroyuki Suda
Fumiaki Otsuka
Takayoshi Nishijima
Hiroshi Uesugi
Naoki Kondo
Takeo Nasu
Hiroyuki Suda
Fumiaki Otsuka
Takayoshi Nishijima
Hiroshi Uesugi
Naoki Kondo
Takeo Nasu
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