PURPOSE: To obtain film quality with high reliability by providing a device forming a reflection film or a recording film on a substrate, a tray mounting the substrate, and a device carrying it, and a device rinsing the tray.

CONSTITUTION: An Al sputter device 11 consists of a preparatory vacuum chamber 12, a sputter window 13, and a preparatory vacuum chamber 14. A resin substrate 2 is placed on a carrying tray 15 and the total is placed in a carrying system 16. When the tray passes through the sputter device 11, Al film is formed on the resin base 2 in the sputter chamber 13 by an Al target 17. Further, the Al reflecting film is formed to the tray 15 at the same time. The sputtered tray 15 is extracted by a disc extracting device 18, only the disc 19 formed with the Al reflecting film is extracted, and the tray 15 is fed to a rinse device 20 according to the carrying system 16. The rinse device 20 has a KOH rinse tank 21 and a drying tank 22 capable of drying with fron vapor after pure water rinsing, the adhered Al is removed completely through the rinse device 20 from the tray 15, then the tray 15 is returned to the original substrate set position and the resin substrate 2 is furnished again.