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Title:
METHOD AND APPARATUS FOR OPTICALLY MEASURING PARTICLE CONCENTRATION
Document Type and Number:
Japanese Patent JPH1151844
Kind Code:
A
Abstract:

To analyze a particle concentration of a sample of small particles such as a collide, etc., or a high-concentration sample with high reliability, by measuring a ratio of light intensities before and after the light passes the sample, and converting the ratio to the particle concentration.

An optical particle concentration-measuring apparatus which measures a concentration of a polishing slurry, etc., includes a sample illumination means 100 comprising a semitransparent lens 36, a sample unit 38, etc., detector modules 46, 50 constituted of a photodiode array or the like, and a concentration value calculation display means 110 having an operating part 56. A half of a laser light is reflected by a semireflecting lens, and the reflected light is sent to the detector module 46. The passing light is sent to the detector module 50 after passing a sample in the sample unit 38. Currents generated at each module are input to the operating part 56 after having been amplified. An energy ratio of lights before and after passing the sample is compared with an already set reference value, converted to a particle concentration and displayed.


Inventors:
RI CHUZEN
DEN ZAIGO
KIN KENSHUKU
CHAE SEUNG-KI
Application Number:
JP9610598A
Publication Date:
February 26, 1999
Filing Date:
April 08, 1998
Export Citation:
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Assignee:
SAMSUNG ELECTRONIC
International Classes:
G01N21/05; G01N21/27; G01N21/59; G01N15/06; (IPC1-7): G01N15/06; G01N21/05; G01N21/27; G01N21/59
Attorney, Agent or Firm:
Hagiwara Makoto