Title:
METHOD AND APPARATUS FOR REMOVING DEPOSIT OF SURFACE BY LASER
Document Type and Number:
Japanese Patent JP2615362
Kind Code:
B2
Abstract:
PURPOSE: To provide a method and an apparatus for removing deposit of a surface with a laser in which the deposit can be removed without damaging the apparatus itself, the removed deposit is scarcely adhered to a lens, etc., the deposit can be efficiently recovered, with less fear of recontamination and the deposit which cannot be removed only with a laser beam can be applied.
CONSTITUTION: The apparatus for removing deposit of a surface with a laser comprises a laser oscillator 12 for generating a pulse laser beam 1, a lens system 14 for condensing the beam to a linear focus 2, and a moving unit 16 for relatively moving a surface deposit 3 in a direction perpendicular to the focus to irradiate the deposit, wherein the deposit is removed by ablation. The oscillator is a CO2 laser oscillator, and the pulse laser beam is a high repetition pulse beam having about 1000pps. The lens system is a cylindrical lens having a cylindrical surface.
Inventors:
Hideo Tashiro
Akira Tsunami
Akira Tsunami
Application Number:
JP1618194A
Publication Date:
May 28, 1997
Filing Date:
February 10, 1994
Export Citation:
Assignee:
RIKEN
International Classes:
B09B3/00; H01S3/00; G21F9/28; (IPC1-7): G21F9/28; H01S3/00
Domestic Patent References:
| JP4168400A | ||||
| JP58187898A | ||||
| JP4109200A | ||||
| JP63241399A |
Attorney, Agent or Firm:
Minoru Hotta (1 person outside)
Previous Patent: METHOD AND DEVICE FOR CARRYING OUT CLOTH FROM SPREADING MACHINE
Next Patent: STEREOSCOPIC PICTURE DEVICE
Next Patent: STEREOSCOPIC PICTURE DEVICE