Title:
METHOD AND APPARATUS FOR REPLACING SUBSTRATE
Document Type and Number:
Japanese Patent JP3174691
Kind Code:
B2
Abstract:
PURPOSE: To shorten the processing tact by shortening the time required for replacing a substrate through a simple structure for replacing the substrate using a single hand.
CONSTITUTION: A hand 30a holding an unprocessed substrate 20 is advanced into a chamber 11 where the unprocessed substrate 20 is delivered to a supporting pin 12. The processed substrate 20 is supported temporarily by a traversal p in 13 and received by the hand 30a which is then retracted to the outside of the chamber 11 to carrying the processed substrate 20 to the outside of the chamber 11. Consequently, the unprocessed substrate 20 can be transferred from the preceding process to the front of the chamber 11 by means of the hand 30a before a processed substrate 20 can be carried out and the processed substrate 20 can be transferred to the next process by means of the hand 30a after the unprocessed substrate 20 is carried in before the processing is ended.
Inventors:
Satoshi Taniguchi
Katsumi Shimaji
Yasumasa Shima
Katsumi Shimaji
Yasumasa Shima
Application Number:
JP20109694A
Publication Date:
June 11, 2001
Filing Date:
August 25, 1994
Export Citation:
Assignee:
Dainippon Screen Mfg. Co., Ltd.
International Classes:
G02F1/13; B05C13/00; B65G49/07; H01L21/02; H01L21/677; H01L21/68; H05K3/06; (IPC1-7): H01L21/68
Domestic Patent References:
| JP469917A |
Attorney, Agent or Firm:
Shigeaki Yoshida (2 outside)