PURPOSE: To improve an observation state by an electron microscope, by a method wherein a specimen solution having fine particles suspended therein is dispersed by the use of vibration energy excited at the leading end of an ultrasonic vibrator to form an aerosol which is, in turn, collected on a specimen support film.

CONSTITUTION: A specimen solution having fine particles preliminarily dispersed therein is held in the recessed part 23 formed to the leading end of a vibrator main body 22. Next, the switch 64 of a power source 62 is turned ON to supply a current to a piezoelectric element 24 and ultrasonic vibration is generated in the piezoelectric element 24. By this mechanism, the vibration is transmitted to the vibrator main body 22 and energy density becomes max. at the recessed part 23 provided to the leading end of the main body 22 and, therefore, the specimen solution is formed into an aerosol 8 to be scattered from the recessed part 23. The scattered aerosol 8 is allowed to naturally fall on the specimen support film 9 placed on the flat surface 41 of a holding stand 4 under gravity to be sampled as a microscopic examination specimen.