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Title:
METHOD AND APPARATUS FOR SEPARATION AND CLASSIFICATION OF GRANULAR MATTER
Document Type and Number:
Japanese Patent JP2006314999
Kind Code:
A
Abstract:

To provide a method and an apparatus for separation and classification of granular matter stably charging the granular matter for a long time and effectively separating and classifying it.

The apparatus for separation and classification of granular matter in a treating space is provided with a clean space A generating photoelectrons, having a photoelectron emitting material 3, an irradiation source 1 for irradiating the photoelectron emitting material with UV rays and/or radiation, and a dust removing means 12 for decreasing the fine particle concentration to one million particles/ft3 or less; a means 9 for supplying the photoelectrons generated in the clean space A to a treating space 20 containing granular matter 19 and separating and classifying the photoelectrons; and a classification part E classifying the granular matter 21 charged by the photoelectrons, comprising a collection electrode 23 collecting and removing unnecessary fine particles, fine holes 24 removing comparatively large, unnecessary fine particles, and a taking out port 25 for particles having a certain size.


Inventors:
FUJII TOSHIAKI
Application Number:
JP2006173273A
Publication Date:
November 24, 2006
Filing Date:
June 23, 2006
Export Citation:
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Assignee:
EBARA CORP
International Classes:
B03C3/38; B03C3/45; B03C7/00; B03C7/02; H01L21/02
Attorney, Agent or Firm:
Dai Matsuda