PURPOSE: To smoothly feed a liquid treatment into fine holes of a material to be treated by feeding the liquid treatment from supplying means in parallel with the surface of a board by high speed liquid flow generating means, sucking it by liquid sucking means, and again returning it to the supply means by circulating means.
CONSTITUTION: High speed liquid flow generating means 5 has an opening 5c near a aboard 1, a discharge port 5a for supplying a liquid treatment 8, and a suction port 5b for sucking it. The liquid treatment 8 is fed in parallel with the board 1 through the opening 5c by discharge and suction pumps 6, 7, a passage is narrowed, and the liquid treatment is fed at a high speed. Accordingly, pressure difference is generated in a through hole 10 of the board 1, the liquid treatment inside is sucked together with bubbles, and an inner wall can be treated with fresh liquid treatment. The board 1 is guided by a guide rail 3, held by a roller 4, and moved to sequentially treat the holes 10. A rollerlike spacer 9 is provided to the member of the means 5 to keep a distance from the board 1.
INAGAWA HIDEHO