Title:
METHOD FOR BLENDING AND RECIRCULATING DEUTERIUM-CONTAINING GAS
Document Type and Number:
Japanese Patent JP2005035883
Kind Code:
A
Abstract:
To provide a method for blending a deuterium-containing mixtures used for optical fiber manufacturing, and recovering, purifying and recirculating these mixtures.
A deuterium-containing exhaust gas mixture from a process chamber 50, which may contains impurities, is sent through lines 51, 53, recovered by a pump 60, further sent to a purifying unit 70 through a line 60 to be purified. The purified gas is sent to a storage tank 80 through a line 72 and stored. The purified, deuterium-containing gas mixture is blended with a pure deuterium gas from a storage tank 10 in a line 82 and an inert gas from a storage tank 20, and recirculated.
Inventors:
SHIRLEY ARTHUR I
HWANG SHUEN-CHENG
HWANG SHUEN-CHENG
Application Number:
JP2004205476A
Publication Date:
February 10, 2005
Filing Date:
July 13, 2004
Export Citation:
Assignee:
BOC GROUP INC
International Classes:
C03B37/00; B01D53/00; C01B4/00; C03B37/014; C03C25/60; C03C25/64; (IPC1-7): C03B37/00
Domestic Patent References:
| JP2002148450A | 2002-05-22 |
Foreign References:
| WO2002006868A2 | 2002-01-24 |
Attorney, Agent or Firm:
Kazuo Shamoto
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Minako Matsuyama
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Minako Matsuyama
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