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Title:
METHOD FOR CALIBRATING AND ALIGNING MULTIPLE MULTI-AXES OPERATING STAGES IN ORDER TO OPTICALLY ALIGN IN RELATION TO PLANAR TYPE WAVEGUIDE DEVICE AND SYSTEM
Document Type and Number:
Japanese Patent JP2003185410
Kind Code:
A
Abstract:

To provide a means for accurately aligning a positioning stage and a fiber sensor.

The optical system detects light and couples it to an optical device, and the means forms an alignment for the system and calibrates the system. The system includes the positioning stages (706, 712) and the fiber sensors (708, 602 and 610). The fiber sensor is used for detecting positions of other sensors (620, 622) and a calibrating part (714) having various forms. The miss alignment of the sensor and the positioning stage is calculated based on these detected positions, and the calibration can be carried out. The fiber sensor is used for calibrating the system.


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Inventors:
KENNEDY WILLIAM P
MEDBERRY JOHN BERNARD
WASHBURN DAVID
GUGGENHEIMER BENNO
ADAMES JAMES D
Application Number:
JP2002271396A
Publication Date:
July 03, 2003
Filing Date:
September 18, 2002
Export Citation:
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Assignee:
AGILENT TECHNOLOGIES INC
International Classes:
G01B11/00; G01B11/27; H01L31/02; H01L31/0232; (IPC1-7): G01B11/00; H01L31/02; H01L31/0232
Attorney, Agent or Firm:
Kaoru Furuya (3 outside)



 
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