Title:
基板、パターン、及び計測装置の較正方法
Document Type and Number:
Japanese Patent JP7267882
Kind Code:
B2
Abstract:
A pattern according to an embodiment includes first and second line patterns, each of the first and second line patterns extends in a direction intersecting a <111> direction and has a side surface, the side surface has at least one {111} crystal plane, the side surface of the first line pattern has a first roughness, and the side surface of the second line pattern has a second roughness larger than the first roughness.
Inventors:
Shin Iida
Satoshi Tanaka
Takayuki Uchiyama
Satoshi Tanaka
Takayuki Uchiyama
Application Number:
JP2019168052A
Publication Date:
May 02, 2023
Filing Date:
September 17, 2019
Export Citation:
Assignee:
Kioxia Co., Ltd.
International Classes:
H01L21/66; G01B15/08
Domestic Patent References:
| JP2008171911A | ||||
| JP4289411A | ||||
| JP2008288272A | ||||
| JP2008311439A | ||||
| JP2003262947A |
Attorney, Agent or Firm:
Sakai International Patent Office
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