Title:
磁性金属異物の捕捉方法及び磁性金属異物の捕捉装置並びに被処理物の検査方法
Document Type and Number:
Japanese Patent JP4760781
Kind Code:
B2
Inventors:
Tamotsu Sato
Kota Ashikari
Kenji Takayama
Kota Ashikari
Kenji Takayama
Application Number:
JP2007156615A
Publication Date:
August 31, 2011
Filing Date:
June 13, 2007
Export Citation:
Assignee:
Sumitomo Bakelite Co., Ltd.
International Classes:
B03C1/00; B03C1/28; H01L21/56
Domestic Patent References:
| JP53136764A | ||||
| JP56062558A |
Attorney, Agent or Firm:
Shinichi Kikuchi
Toru Kikuchi
Toru Kikuchi