METHOD FOR CENTERING VACUUM PUMP AND/OR REDUCING FLOATING MAGNETIC FIELD OF VACUUM PUMP OR FLOATING MAGNETIC FIELD OF ROTARY APPARATUS FOR VACUUM PUMP

Japanese Patent JP2014059059

A

To provide a rotary apparatus for a vacuum pump or a turbo molecular pump allowed to be continuously and surely operated without generating abrasion even at an extremely hight rotational frequency and allowing generation of only a slight floating magnetic field during operation.

A magnetic field generated by a permanent magnet type magnetic bearing 44 is changed during operation of a vacuum pump so that a floating magnetic field generated by the permanent magnet type magnetic bearing 44 is reduced. Permanent magnet characteristics inherent in a shape and/or a material of the permanent magnet type magnetic bearing 44 are changed on the basis of a state of eccentricity and/or a state of the floating magnetic field.

WO/2021/237910	ACTIVE MAGNETIC BEARING CONTROLLER CONSTRUCTION METHOD BASED ON TABLE LOOKUP METHOD
JP4942337	Magnetic bearing equipment
JPH0610485	[Title of Invention] Control device for magnetic bearing

CONRAD ARMIN
KOCI BERND
ANDREAS RIPPL
ADRIAN WIRTH

JP2013188971A

April 03, 2014

September 12, 2013

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PFEIFFER VACUUM GMBH

F16C32/04; F04D19/04

JPS63210414A	1988-09-01
JPS62134924U	1987-08-25
JPS58119621U	1983-08-15
JPH04219494A	1992-08-10
JPS6230565A	1987-02-09
JPH04219494A	1992-08-10
JPS6230565A	1987-02-09
JPH0783188A	1995-03-28
JPH0712091A	1995-01-17
JP2011517059A	2011-05-26
JPH11166607A	1999-06-22
JPS63210414A	1988-09-01
JPS62134924U	1987-08-25
JPS58119621U	1983-08-15

Mitsufumi Esaki
Blacksmith
Ryota Imamura
Atsushi Shinohara
Kiyota Eisho

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