Title:
METHOD FOR CENTERING VACUUM PUMP AND/OR REDUCING FLOATING MAGNETIC FIELD OF VACUUM PUMP OR FLOATING MAGNETIC FIELD OF ROTARY APPARATUS FOR VACUUM PUMP
Document Type and Number:
Japanese Patent JP2014059059
Kind Code:
A
Abstract:
To provide a rotary apparatus for a vacuum pump or a turbo molecular pump allowed to be continuously and surely operated without generating abrasion even at an extremely hight rotational frequency and allowing generation of only a slight floating magnetic field during operation.
A magnetic field generated by a permanent magnet type magnetic bearing 44 is changed during operation of a vacuum pump so that a floating magnetic field generated by the permanent magnet type magnetic bearing 44 is reduced. Permanent magnet characteristics inherent in a shape and/or a material of the permanent magnet type magnetic bearing 44 are changed on the basis of a state of eccentricity and/or a state of the floating magnetic field.
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Inventors:
CONRAD ARMIN
KOCI BERND
ANDREAS RIPPL
ADRIAN WIRTH
KOCI BERND
ANDREAS RIPPL
ADRIAN WIRTH
Application Number:
JP2013188971A
Publication Date:
April 03, 2014
Filing Date:
September 12, 2013
Export Citation:
Assignee:
PFEIFFER VACUUM GMBH
International Classes:
F16C32/04; F04D19/04
Domestic Patent References:
JPS63210414A | 1988-09-01 | |||
JPS62134924U | 1987-08-25 | |||
JPS58119621U | 1983-08-15 | |||
JPH04219494A | 1992-08-10 | |||
JPS6230565A | 1987-02-09 | |||
JPH04219494A | 1992-08-10 | |||
JPS6230565A | 1987-02-09 | |||
JPH0783188A | 1995-03-28 | |||
JPH0712091A | 1995-01-17 | |||
JP2011517059A | 2011-05-26 | |||
JPH11166607A | 1999-06-22 | |||
JPS63210414A | 1988-09-01 | |||
JPS62134924U | 1987-08-25 | |||
JPS58119621U | 1983-08-15 |
Attorney, Agent or Firm:
Mitsufumi Esaki
Blacksmith
Ryota Imamura
Atsushi Shinohara
Kiyota Eisho
Blacksmith
Ryota Imamura
Atsushi Shinohara
Kiyota Eisho
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