Title:
METHOD FOR CLEANING OPTICAL SURFACE MONITORING DEVICE
Document Type and Number:
Japanese Patent JP2023101596
Kind Code:
A
Abstract:
To provide a cleaning method capable of removing abrasive grains stuck to a light passage in a polishing table.SOLUTION: This cleaning method guides light through a light passage 50A provided in a polishing table 3 to a substrate W during polishing of the substrate W, passes reflected light from the substrate W through the light passage 50A, supplies pure water through the light passage 50A with a pure water discharge valve 74 kept closed on a pure water discharge line 54 communicated with the light passage 50A in a state where rotation of the polishing table is stopped and in a state where the substrate W is not present on a polishing pad 2 after the polishing of the substrate W, stops supplying of the pure water and opens the pure water discharge valve 74 to discharge the pure water from the light passage 50A after passage of prescribed pure water supply time, then supplies a chemical solution through the light passage 50A, and removes abrasive grains stuck to the light passage 50A with the chemical solution.SELECTED DRAWING: Figure 2
Inventors:
SASAKI TOSHIMITSU
Application Number:
JP2023082975A
Publication Date:
July 21, 2023
Filing Date:
May 19, 2023
Export Citation:
Assignee:
EBARA CORP
International Classes:
B24B37/013; B24B49/12; B24B55/06; H01L21/304
Attorney, Agent or Firm:
Tetsuya Hirosawa
Isamu Watanabe
Goto Manabu
Mitsuhiro Kanazawa
Isamu Watanabe
Goto Manabu
Mitsuhiro Kanazawa