Title:
METHOD FOR CLEANING PRECISION OPTICAL ELEMENT
Document Type and Number:
Japanese Patent JPH083778
Kind Code:
A
Abstract:
PURPOSE: To prevent the surface of a precision optical element from being stained with water spots.
CONSTITUTION: A precision optical element (material 6 to be cleaned) is dipped ire a water-soluble solvent (IPA 3) in the first stage. The material 6 is dipped in a water-insoluble solvent (octane 4) in the second stage to replace the IPA 3 with the octane 4. In this case, solvent capable of dissolving a water-soluble solvent by ≤30wt.% is to be used in the second stage. An ultrasonic vibration of 20-100kHz frequency is exerted on the water-soluble solvent, add the octane 4 is dried in the third stage.
Inventors:
TOMITANI MANABU
Application Number:
JP15806694A
Publication Date:
January 09, 1996
Filing Date:
June 15, 1994
Export Citation:
Assignee:
OLYMPUS OPTICAL CO
International Classes:
B08B3/08; C11D7/22; C11D7/24; C11D7/26; C23G5/02; (IPC1-7): C23G5/02; B08B3/08; C11D7/22; C11D7/24; C11D7/26
Attorney, Agent or Firm:
Takeshi Nara
Next Patent: HORIZONTAL TYPE MULTI-STAGE ELECTROLYTIC CELL