Title:
METHOD OF CLEANING SURFACE OF ARTICLE AND DEVICE USED FOR SAID METHOD
Document Type and Number:
Japanese Patent JPS5599374
Kind Code:
A
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Inventors:
HOSHINO TOSHIO
Application Number:
JP711779A
Publication Date:
July 29, 1980
Filing Date:
January 26, 1979
Export Citation:
Assignee:
HITACHI LTD
International Classes:
B41F17/36; B08B1/00; B08B11/00; H01L23/00; (IPC1-7): B08B1/00; H01L23/00