PURPOSE: To efficiently coat powder particles with the compd. of the metal of a metal halide and nitrogen element by supplying metal halide vapor and gaseous nitrogen into a heat resistant tube generated by plasma and further supplying the powder particles thereto.
CONSTITUTION: Gaseous Ar is supplied from a shielding gas introducing part 7 and a carrier gas introducing hole 5 into a quartz tube 3 and is filled thereon. The plasma is generated by the operation of a high-frequency generator 2 and a high-frequency output is increased. Cooling water is circulated to the quartz tube 3 and a nozzle structure 4. While H2 is supplied from the introducing part 7, the high frequency output is increased and, thereafter, a TiCl4 soln. kept at a prescribed temp. is supplied from the introducing part 7 into the quartz tube 3 by the gaseous Ar. The gaseous N2 is supplied therein as well. SiC powder is supplied from the introducing hole 5 into the quartz tube 3 and is brought into reaction, by which the surface of the SiC powder is coated with TiN. This powder is deposited on a powder capturing tray 9 in a powder capturing chamber 8. The coating of the surface of the SiC powder with the TiN is efficiently executed at the high speed in this way.
TSUNODA HIDEO
TAKEDA YASUYUKI
KODAMA KATSU
