To provide a method of constructing an embedded fine flow path (micro channel) in a substrate of diamond precisely with a relatively simple procedure.
The method of constructing an embedded flow path in the diamond substrate includes the following steps of (1)-(4): (1) a step of making a surface part in an exposed state corresponding to the part where the flow path is to be formed and forming a barrier layer on the surface of the diamond surface other than the exposed part; (2) a step of injecting ions from the surface of the diamond substrate where the barrier layer is formed in the step (1); (3) a step of heating the diamond substrate where ions have been injected and forming a graphitized non diamond layer in the diamond substrate; and (4) a step of removing the graphitized non diamond layer by etching to form the flow path.
MOKUNO YOSHIAKI
YAMADA HIDEAKI
| JP2008526682A | 2008-07-24 |
| WO2008029736A1 | 2008-03-13 |