PURPOSE: To guarantee a continuity surely and without its deterioration by a method wherein, while a cylindrical continuity pin whose tip is round is being pressed onto a specimen, the pin is turned by using a point, where the continuity pin comes into contact with the specimen, as a flucrum.

CONSTITUTION: Specimens 14 to 16 are fixed to a holder; cylindrical continuity pins 17, 18 whose tip is round are pressed onto the specimens 14 to 16. While the continuity pins 17, 18 are being pressed, they are turned by using a point, where the continuity pins 17, 18 come into contact with the specimens 14 to 16, as a flucrum. For example, continuity pins 17, 18 which are composed of a rotary part 17 and a fixed part 18 and whose tip is thick and has been rounded so as to increase a contact area are pressed onto a specimen which is composed of a mask blank 14, a chromium film 15 and a resist 16. The rotary part 17 is turned in the direction of an arrow 20 by a turning force which is exerted through the blank 14; it comes into contact with the chromium film 15 by excluding the soft resist part 16; and a continuity can be established between the holder and the specimen.