To provide automatic concentration control equipment which prepares a cleaning liquid by using many kinds of powder cleaners (A) and can easily respond to changes of characteristics of the powder cleaners and a positional relation between a powder supply device and a dissolution device even when their changes occur, and to provide a method capable of quickly and exactly performing automatic concentration control of the cleaning liquid comprising the many kinds of powder cleaners by using the equipment.
The automatic concentration control equipment of the cleaning liquid comprising the powder cleaners (A) is composed of: the powder supply device; a water feed device; the dissolution device; an electric conductivity meter; and a control device which outputs a supply command to the powder supply device or the water feed device based on electric conductivity, wherein a feeder part of the powder supply device is detachably constituted such that the feeder part of the powder supply device can be exchanged in accordance with the characteristics of the powder cleaners (A) and the positional relation between the powder supply device and the dissolution device.
COPYRIGHT: (C)2008,JPO&INPIT
MISAKI SHOHEI
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