Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
METHOD FOR CONTROLLING CONSUMPTION AMOUNT OF CUTTING BLADE
Document Type and Number:
Japanese Patent JP2011104668
Kind Code:
A
Abstract:

To provide a method for controlling consumption amount of a cutting blade in a cutting device with the cutting blade capable of always continuing cutting.

This method is used in the cutting device including first and second chuck tables. The method includes a first cutting process for holding and cutting a wafer on the first chuck table, a second cutting process for holding and cutting a wafer on the second chuck table, a consumption amount calculating process for positioning the first chuck table just under a depth detection means by utilizing time while the second cutting process is executed, detecting a depth of a cut groove formed in the wafer by the depth detection means and calculating the consumption amount of the cutting blade from the detected groove depth, and a position correcting process for correcting an origin position of a height direction of the cutting blade based on the consumption amount of the cutting blade.


Inventors:
OKUNARI KENGO
Application Number:
JP2009259216A
Publication Date:
June 02, 2011
Filing Date:
November 12, 2009
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
B24B49/03; B24B27/06; B24B41/04; B24B41/06; H01L21/301
Domestic Patent References:
JP2006156809A2006-06-15
Attorney, Agent or Firm:
Akira Matsumoto
Kenji Ito