Title:
化学気相堆積を用いるカーボンナノチューブの直径を制御する方法及び電界効果トランジスタの製造方法
Document Type and Number:
Japanese Patent JP4658947
Kind Code:
B2
Abstract:
The diameter of carbon nanotubes grown by chemical vapor deposition is controlled independent of the catalyst size by controlling the residence time of reactive gases in the reactor.
Inventors:
Grill, alfred
New Mayer, Deborah
Shin, Dinker
New Mayer, Deborah
Shin, Dinker
Application Number:
JP2006536082A
Publication Date:
March 23, 2011
Filing Date:
October 14, 2004
Export Citation:
Assignee:
INTERNATIONAL BUSINESS MASCHINES CORPORATION
International Classes:
C01B31/02; B01J23/88; C23C16/26; C23C16/52; C30B25/00; C30B25/10; C30B29/60; D01F9/12; H01J9/02; H01L51/30; H05H1/24
Domestic Patent References:
| JP2006505483A | ||||
| JP2002118248A |
Foreign References:
| WO2003068676A1 | ||||
| US20030004058 | ||||
| EP1481946A1 | ||||
| WO2003027011A1 |
Other References:
Yue-Ying FAN, et al.,The influence of preparation parameters on the mass production of vapor-grown carbon nanofibers,Carbon,2000, Vol.38,pp.789-795
Attorney, Agent or Firm:
Takeshi Ueno
Tasaichi Tanae
Yoshihiro City
Hiroshi Sakaguchi
Tasaichi Tanae
Yoshihiro City
Hiroshi Sakaguchi