To provide a method for controlling a material amount to be delivered during material transfer.
The method includes a step of inputting a target amount of the material to be delivered from a source position to a target position, a step of updating the target amount during delivery of the material by using algorithm of a prediction model base, and a step of updating the algorithm of the prediction model base based on process performance data by using a recursive minimum square procedure. An adaption selection algorithm is used for determining whether an algorithm parameter of at least one preceding prediction model base is to be replaced with an algorithm parameter of at least one new prediction model base, in order to adapt the algorithm of the prediction model base in response to a process change. The method is used for overlapping delivery of at least one material to be measured independently with delivery of a main material during a material transfer step.
CHAPPELL DAVID ARTHUR
IVEY LARA JEANNE
JPH10142035A | 1998-05-29 | |||
JPS61137021A | 1986-06-24 | |||
JPS5417062A | 1979-02-08 | |||
JPS5332762A | 1978-03-28 |
Kazuo Abe
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