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Title:
METHOD FOR CONTROLLING PIEZOELECTRIC DRIVE DEVICE, PIEZOELECTRIC DRIVE DEVICE, AND ROBOT
Document Type and Number:
Japanese Patent JP2021182816
Kind Code:
A
Abstract:
To provide a method for detecting a piezoelectric motor with abnormality in a piezoelectric drive device with a multiple configuration.SOLUTION: In a method for controlling a piezoelectric drive device in which a plurality of piezoelectric motors each having a piezoelectric element for driving and a piezoelectric element for detection are connected, the plurality of piezoelectric motors are driven by the same drive signal, and the drive signal is subjected to tracking control including feedback control of the frequency of the drive signal based on detection signals from the piezoelectric elements for detection, the method includes: storing, as an initial frequency f0, the average frequency of the detection signals when the piezoelectric motors are driven by an initial drive signal subjected to the tracking control; checking whether the difference between the initial frequency f0 and the average frequency fa of the detection signals when the piezoelectric motors are driven by the drive signal during the drive continuing from an initial stage is larger than a first threshold; when the difference is equal to or less than the first threshold, continuing the drive with the drive signal; and when the difference is larger than the first threshold, determining that the drive signal is abnormal.SELECTED DRAWING: Figure 6

Inventors:
SATO KAORI
SAITO HIDETOSHI
Application Number:
JP2020087258A
Publication Date:
November 25, 2021
Filing Date:
May 19, 2020
Export Citation:
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Assignee:
SEIKO EPSON CORP
International Classes:
H02N2/14; B25J17/00; H01L41/09
Attorney, Agent or Firm:
Satoshi Nakai
Hiroki Matsuoka