To perform easily creep prevention and hysteresis compensation of a piezoelectric element simultaneously, and to enhance responsiveness of a positioning device using the piezoelectric element.
A voltage applied to the piezoelectric element is inverted from a plurality of different voltages on a hysteresis loop to a desired target voltage. The creep of the piezoelectric element is detected at the target voltage, to repeat detection of the creep for each different target voltage between a minimum voltage and a maximum voltage. A curve obtained by uniting displacement points, in which the creep for each different target voltage repeatedly detected, gets roughly zero, is derived as a non-creep line. The voltage applied to the piezoelectric element is changed through the hysteresis loop, to be changed towards the target point on the non-creep line corresponding to the last target displacement to be controlled.
TSUKAMOTO TAKESHI
YAMAUCHI AKIRA
| JPS62235788A | 1987-10-15 | |||
| JPS62296778A | 1987-12-24 | |||
| JP2007096057A | 2007-04-12 | |||
| JPH04370986A | 1992-12-24 | |||
| JPS62217880A | 1987-09-25 |
Kakusho Shoichi