Title:
METHOD FOR CONTROLLING ROTARY TABLE AND PROCESSOR
Document Type and Number:
Japanese Patent JP2022132858
Kind Code:
A
Abstract:
To efficiently prevent a variation in temperature of a rotary table in an idle time.SOLUTION: There is provided a method for controlling a rotary table in a processor having a chamber, the rotary table that is accommodated in the chamber, has a mounting part for mounting a plurality of substrates, and is rotatable and elevatable, a heater unit that is accommodated in the chamber and provided below the rotary table, and a temperature sensor that measures the temperature of the rotary table, and the method for controlling the rotary table includes steps of: acquiring the temperature measured by the temperature sensor; and raising or lowering the position of the rotary table in an idle time when specific processing is not performed in the chamber according to a result of comparison between the acquired temperature and a target temperature set in advance.SELECTED DRAWING: Figure 4
Inventors:
KOBAYASHI TAKESHI
Application Number:
JP2021031565A
Publication Date:
September 13, 2022
Filing Date:
March 01, 2021
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
H01L21/683; C23C16/458; C23C16/52; H01L21/31
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Tadahiko Ito
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