PURPOSE: To change the amount of product gas easily and smoothly when the gas supplied from a PSA apparatus is controlled in accordance with the consumption of a user.
CONSTITUTION: By adjusting the amount of gas circulated from the discharge side to the suction side of a compressor 3 for product gas by adjusting the opening of a circulation flow rate control valve 4 installed in a circulation passage 5 connecting between the discharge side and the suction side according to an inputted signal to change the supply of product gas, the amount of the gas supplied from the compressor 3 to a product gas supply passage 6 is adjusted to that set up for the change, and the opening of a control valve 7 installed in the passage 6 is adjusted corresponding to the gas flow conditions set up in advance.
OSOGOSHI KAZUTO
IKEDA KENJI
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