Title:
METHOD FOR CORRECTING DEFECT IN ACTIVE MATRIX SUBSTRATE AND PRODUCTION OF LIQUID CRYSTAL PANEL
Document Type and Number:
Japanese Patent JP3778407
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To correct a short circuit defect between an upper electrode and a lower electrode due to a pinhole defect in an auxiliary capacitor part while the state of an active matrix substrate is present.
SOLUTION: When a short circuit is produced between a lower electrode and an upper electrode due to a pinhole 12 of an insulating film 7 in an auxiliary capacitor part consisting of a common signal wiring 3 or a scanning wiring (lower electrode), and an insulating film 7 and a pixel electrode 5 (upper electrode), a part of the upper electrode 13 near the short circuit defect 12 is removed by irradiation of light energy. Since the defect is corrected in the state of the active matrix substrate before lamination with counter substrate, no influence is added to the refractive index or transmittance of a glass substrate or a color filter forming part or on the alignment of a liquid crystal, or defective products are not sent to the succeeding processes. By using a short wavelength laser of UV rays at ≤360 nm wavelength, for example, by using the fourth order harmonic waves of a YAG laser, only the upper electrode near the short circuit defect can be removed with good accuracy without adding influences on the lower films.
Inventors:
Tetsuya Doi
Application Number:
JP16023999A
Publication Date:
May 24, 2006
Filing Date:
June 07, 1999
Export Citation:
Assignee:
Sharp Corporation
International Classes:
G09F9/00; H01L29/786; G02F1/136; G02F1/1365; G02F1/1368; (IPC1-7): G02F1/1365; G09F9/00; H01L29/786
Domestic Patent References:
| JP1138448A | ||||
| JP7307314A |
Attorney, Agent or Firm:
Hidesaku Yamamoto
Takaaki Yasumura
Takeshi Oshio
Takaaki Yasumura
Takeshi Oshio